Sputter Chamber V1; First Test
First attempt at magnetron sputtering. Variable high voltage DC supplied by 120VAC to variac to MOT (1:59) to diode, max output ~7kV, though 30 amp fuse on variac blows before getting that high. Vacuum from two-stage rotary vane pump (soon to be the roughing pump to a turbomolecular pump). I hid behind an acrylic sheet the entire time in fear of implosion.
Sputter Chamber V1; First Test
Reviewed by Anonymous
on
January 18, 2020
Rating: